High gas barrier property is required to plastic films for electronic devices such as flexible displays. The purpose of this Standard is regulation for determining the water vapor transmission rate of plastic film using a quadrupole mass spectrometer as detector.

Determination of water vapor barrier property of plastic films with high gas barrier used for electronics devices such as flexible displays.

Referenced SEMI Standards (purchase separately)

None.

Revision History

SEMI D80-0421 (first published)